Inventor
Fuse WAKANA
JP3 patents
Patents
3 patentsUS11466043B2Oct 11, 2022
Niobium compound and method of forming thin film
SAMSUNG ELECTRONICS CO LTD0 citations59
US12473309B2Nov 18, 2025
Organometallic compound and method of manufacturing integrated circuit using the same
SAMSUNG ELECTRONICS CO LTD0 citations57
US12410203B2Sep 9, 2025
Organometallic adduct compound and method of manufacturing integrated circuit using the same
SAMSUNG ELECTRONICS CO LTD0 citations57