Inventor
MANABE YOSHIKI
JP3 patents
Patents
3 patentsUS12473309B2Nov 18, 2025
Organometallic compound and method of manufacturing integrated circuit using the same
SAMSUNG ELECTRONICS CO LTD0 citations57
US12410203B2Sep 9, 2025
Organometallic adduct compound and method of manufacturing integrated circuit using the same
SAMSUNG ELECTRONICS CO LTD0 citations57
US11332486B2May 17, 2022
Aluminum compound and method for manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations49