Inventor

BONNEMA GERRIT M

NL2 patents

Patents

2 patents

US6262796B1Jul 17, 2001

Positioning device having two object holders

ASM LITHOGRAPHY BV634 citations96

US5969441AOct 19, 1999

Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning device

ASM LITHOGRAPHY BV1,609 citations95