Inventor
AKBAS MEHMET ALI
US8 patents
⚠️ This page may combine multiple inventors who share the name “AKBAS MEHMET ALI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
5 patentsUS12111581B2Oct 8, 2024
Method to manufacture nano ridges in hard ceramic coatings
ASML HOLDING NV2 citations67
US12529967B2Jan 20, 2026
Method to manufacture nano ridges in hard ceramic coatings
ASML HOLDING NV0 citations57
US11270906B2Mar 8, 2022
Burls with altered surface topography for holding an object in lithography applications
ASML HOLDING NV1 citations56
US11887881B2Jan 30, 2024
Lithographic apparatus, substrate table, and non-uniform coating method
ASML HOLDING NV0 citations54
US12189310B2Jan 7, 2025
Systems and methods for manufacturing a double-sided electrostatic clamp
ASML HOLDING NV0 citations50
ASML NETHERLANDS BV
3 patentsUS10719019B2Jul 21, 2020
Substrate holder and a method of manufacturing a substrate holder
ASML NETHERLANDS BV4 citations67
US12321104B2Jun 3, 2025
Substrate holder for use in a lithographic apparatus
ASML NETHERLANDS BV0 citations57
US11448976B2Sep 20, 2022
Substrate holder for use in a lithographic apparatus
ASML NETHERLANDS BV0 citations57