Inventor
PARK MIN SEOP
KR3 patents
⚠️ This page may combine multiple inventors who share the name “PARK MIN SEOP”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
2 patentsUS11569065B2Jan 31, 2023
Substrate processing apparatus, signal source device, method of processing material layer, and method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD4 citations69
US12456603B2Oct 28, 2025
Substrate processing apparatus, signal source device, method of processing material layer, and method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations57