Inventor
ENOMOTO MASASHI
JP43 patents
⚠️ This page may combine multiple inventors who share the name “ENOMOTO MASASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
27 patentsUS12002676B2Jun 4, 2024
Method for forming mask pattern, storage medium, and apparatus for processing substrate
TOKYO ELECTRON LTD1 citations73
US11604415B2Mar 14, 2023
Substrate processing method, substrate processing apparatus, and computer readable recording medium
TOKYO ELECTRON LTD2 citations73
US11508580B2Nov 22, 2022
Method for forming mask pattern, storage medium, and apparatus for processing substrate
TOKYO ELECTRON LTD4 citations73
US10964606B2Mar 30, 2021
Film forming system, film forming method, and computer storage medium
TOKYO ELECTRON LTD4 citations73
US12123778B2Oct 22, 2024
Thermal imaging sensor for integration into track system
TOKYO ELECTRON LTD2 citations72
US9601394B2Mar 21, 2017
Substrate processing apparatus, substrate processing method and memory medium
TOKYO ELECTRON LTD2 citations72
US10656526B2May 19, 2020
Substrate treatment method and thermal treatment apparatus
TOKYO ELECTRON LTD2 citations71
US12476110B2Nov 18, 2025
Substrate processing module
TOKYO ELECTRON LTD0 citations62
US12051587B2Jul 30, 2024
Substrate processing apparatus, estimation method of substrate processing and recording medium
TOKYO ELECTRON LTD0 citations62
US11594424B2Feb 28, 2023
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations62
US11287798B2Mar 29, 2022
Substrate processing capable of suppressing a decrease in throughput while reducing the impact on exposure treatment caused by warping of a substrate
TOKYO ELECTRON LTD0 citations62
US11637031B2Apr 25, 2023
Systems and methods for spin process video analysis during substrate processing
TOKYO ELECTRON LTD0 citations61
US8010221B2Aug 30, 2011
Cleaning apparatus and method for immersion light exposure
TOKYO ELECTRON LTD6 citations60
US7924396B2Apr 12, 2011
Coating/developing apparatus and pattern forming method
TOKYO ELECTRON LTD3 citations58
US12379200B2Aug 5, 2025
Peripheral edge processing apparatus, peripheral edge processing method, and computer-readable recording medium
TOKYO ELECTRON LTD0 citations52
US12148147B2Nov 19, 2024
Substrate inspection device, substrate inspection method, and storage medium
TOKYO ELECTRON LTD0 citations52
US11876022B2Jan 16, 2024
Substrate treatment method and substrate treatment system
TOKYO ELECTRON LTD0 citations52
US12228390B2Feb 18, 2025
Information processing apparatus, information processing method and computer-readable recording medium
TOKYO ELECTRON LTD0 citations51
US10649335B2May 12, 2020
Substrate processing apparatus, substrate processing method and storage medium
TOKYO ELECTRON LTD0 citations51
US10528028B2Jan 7, 2020
Substrate processing apparatus, substrate processing method and memory medium
TOKYO ELECTRON LTD0 citations51
US12197129B2Jan 14, 2025
Substrate treatment method and substrate treatment system
TOKYO ELECTRON LTD0 citations50
US11809091B2Nov 7, 2023
Substrate processing apparatus and processing condition adjustment method
TOKYO ELECTRON LTD0 citations50
US11036140B2Jun 15, 2021
Substrate processing apparatus, substrate processing method and recording medium
TOKYO ELECTRON LTD0 citations50
US10328546B2Jun 25, 2019
Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method
TOKYO ELECTRON LTD0 citations50
US9669510B2Jun 6, 2017
Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method
TOKYO ELECTRON LTD1 citations50
US12442635B2Oct 14, 2025
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD0 citations48
US10520831B2Dec 31, 2019
Substrate processing method, substrate processing system and substrate processing apparatus
TOKYO ELECTRON LTD0 citations42
DEXERIALS CORP
3 patentsUS9180635B2Nov 10, 2015
Optical element, method of manufacturing optical element, illumination device, window member, and fitting
DEXERIALS CORP7 citations84
US9588267B2Mar 7, 2017
Optical element and method for producing the same
DEXERIALS CORP2 citations73
US10132972B2Nov 20, 2018
Optical element and method for producing the same
DEXERIALS CORP0 citations52
SUZUKI MASAKI
3 patentsUS8520305B2Aug 27, 2013
Optical element, method of manufacturing optical element, illumination device, window member, and fitting
SUZUKI MASAKI9 citations83
US8970949B2Mar 3, 2015
Optical body with suppressed change in color tone and window member, fitting, and solar shading including the optical body
SUZUKI MASAKI5 citations71
US8477414B2Jul 2, 2013
Optical element, window material, fitting, and insolation shielding device
SUZUKI MASAKI4 citations59