P

Inventor

ENOMOTO MASASHI

JP43 patents
⚠️ This page may combine multiple inventors who share the name “ENOMOTO MASASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

27 patents
US12002676B2Jun 4, 2024

Method for forming mask pattern, storage medium, and apparatus for processing substrate

TOKYO ELECTRON LTD1 citations73
US11604415B2Mar 14, 2023

Substrate processing method, substrate processing apparatus, and computer readable recording medium

TOKYO ELECTRON LTD2 citations73
US11508580B2Nov 22, 2022

Method for forming mask pattern, storage medium, and apparatus for processing substrate

TOKYO ELECTRON LTD4 citations73
US10964606B2Mar 30, 2021

Film forming system, film forming method, and computer storage medium

TOKYO ELECTRON LTD4 citations73
US12123778B2Oct 22, 2024

Thermal imaging sensor for integration into track system

TOKYO ELECTRON LTD2 citations72
US9601394B2Mar 21, 2017

Substrate processing apparatus, substrate processing method and memory medium

TOKYO ELECTRON LTD2 citations72
US10656526B2May 19, 2020

Substrate treatment method and thermal treatment apparatus

TOKYO ELECTRON LTD2 citations71
US12476110B2Nov 18, 2025

Substrate processing module

TOKYO ELECTRON LTD0 citations62
US12051587B2Jul 30, 2024

Substrate processing apparatus, estimation method of substrate processing and recording medium

TOKYO ELECTRON LTD0 citations62
US11594424B2Feb 28, 2023

Substrate processing method and substrate processing apparatus

TOKYO ELECTRON LTD0 citations62
US11287798B2Mar 29, 2022

Substrate processing capable of suppressing a decrease in throughput while reducing the impact on exposure treatment caused by warping of a substrate

TOKYO ELECTRON LTD0 citations62
US11637031B2Apr 25, 2023

Systems and methods for spin process video analysis during substrate processing

TOKYO ELECTRON LTD0 citations61
US8010221B2Aug 30, 2011

Cleaning apparatus and method for immersion light exposure

TOKYO ELECTRON LTD6 citations60
US7924396B2Apr 12, 2011

Coating/developing apparatus and pattern forming method

TOKYO ELECTRON LTD3 citations58
US12379200B2Aug 5, 2025

Peripheral edge processing apparatus, peripheral edge processing method, and computer-readable recording medium

TOKYO ELECTRON LTD0 citations52
US12148147B2Nov 19, 2024

Substrate inspection device, substrate inspection method, and storage medium

TOKYO ELECTRON LTD0 citations52
US11876022B2Jan 16, 2024

Substrate treatment method and substrate treatment system

TOKYO ELECTRON LTD0 citations52
US12228390B2Feb 18, 2025

Information processing apparatus, information processing method and computer-readable recording medium

TOKYO ELECTRON LTD0 citations51
US10649335B2May 12, 2020

Substrate processing apparatus, substrate processing method and storage medium

TOKYO ELECTRON LTD0 citations51
US10528028B2Jan 7, 2020

Substrate processing apparatus, substrate processing method and memory medium

TOKYO ELECTRON LTD0 citations51
US12197129B2Jan 14, 2025

Substrate treatment method and substrate treatment system

TOKYO ELECTRON LTD0 citations50
US11809091B2Nov 7, 2023

Substrate processing apparatus and processing condition adjustment method

TOKYO ELECTRON LTD0 citations50
US11036140B2Jun 15, 2021

Substrate processing apparatus, substrate processing method and recording medium

TOKYO ELECTRON LTD0 citations50
US10328546B2Jun 25, 2019

Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method

TOKYO ELECTRON LTD0 citations50
US9669510B2Jun 6, 2017

Polishing cleaning mechanism, substrate processing apparatus, and substrate processing method

TOKYO ELECTRON LTD1 citations50
US12442635B2Oct 14, 2025

Substrate processing apparatus, substrate processing method, and storage medium

TOKYO ELECTRON LTD0 citations48
US10520831B2Dec 31, 2019

Substrate processing method, substrate processing system and substrate processing apparatus

TOKYO ELECTRON LTD0 citations42

DEXERIALS CORP

3 patents

SUZUKI MASAKI

3 patents

YOSHIDA HIRONORI

2 patents

NAGAHAMA TSUTOMU

2 patents

SONY CORP

2 patents

KANSAI PAINT CO LTD

1 patent

TAKENAKA HIROYA

1 patent

OKUNO MORIAKI

1 patent

KAGEYAMA MASAMITSU

1 patent