Inventor · disambiguated record

Wolfgang Kähler

Also filed as: KAEHLER WOLFGANG

1 granted patent·11 citations·filing 2003–2003

33Inventor score

Technology areasG01B

Files withZEISS CARL SMT AG1

Top patents by PatentIndex Score

1 record

0158US7002694B2Interferometer system and method for recording an interferogram using weighted averaging over multiple frequencies, and method for providing and manufacturing an object having a target surfaceZEISS CARL SMT AG·Filed 2003·Granted Feb 21, 2006·11 cites·14 claims

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