Inventor
SHERO ERIC JAMES
US56 patents
Patents
50 patentsUS10276355B2Apr 30, 2019
Multi-zone reactor, system including the reactor, and method of using the same
ASM IP HOLDING BV412 citations98
US9228259B2Jan 5, 2016
Method for treatment of deposition reactor
ASM IP HOLDING BV515 citations98
US11377732B2Jul 5, 2022
Reactant vaporizer and related systems and methods
ASM IP HOLDING BV6 citations86
US10876205B2Dec 29, 2020
Reactant vaporizer and related systems and methods
ASM IP HOLDING BV11 citations86
US11521851B2Dec 6, 2022
Method of forming structures including a vanadium or indium layer
ASM IP HOLDING BV5 citations84
US11306395B2Apr 19, 2022
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus
ASM IP HOLDING BV7 citations84
US8894870B2Nov 25, 2014
Multi-step method and apparatus for etching compounds containing a metal
ASM IP HOLDING BV9 citations84
US10844486B2Nov 24, 2020
Semiconductor processing reactor and components thereof
ASM IP HOLDING BV8 citations83
US10480072B2Nov 19, 2019
Semiconductor processing reactor and components thereof
ASM IP HOLDING BV7 citations83
US12354877B2Jul 8, 2025
Vapor deposition of films comprising molybdenum
ASM IP HOLDING BV4 citations74
US12237171B1Feb 25, 2025
Method of forming vanadium nitride layer and structure including the vanadium nitride layer
ASM IP HOLDING BV2 citations74
US11946136B2Apr 2, 2024
Semiconductor processing device
ASM IP HOLDING BV2 citations73
US11624113B2Apr 11, 2023
Heating zone separation for reactant evaporation system
ASM IP HOLDING BV3 citations73
US11976361B2May 7, 2024
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus
ASM IP HOLDING BV2 citations72
US11885013B2Jan 30, 2024
Method of forming vanadium nitride layer and structure including the vanadium nitride layer
ASM IP HOLDING BV2 citations72
US11873557B2Jan 16, 2024
Method of depositing vanadium metal
ASM IP HOLDING BV2 citations72
US11742189B2Aug 29, 2023
Multi-zone reactor, system including the reactor, and method of using the same
ASM IP HOLDING BV2 citations72
US11634812B2Apr 25, 2023
Solid source sublimator
ASM IP HOLDING BV1 citations72
US11901175B2Feb 13, 2024
Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer
ASM IP HOLDING BV2 citations71
US11424119B2Aug 23, 2022
Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer
ASM IP HOLDING BV2 citations71
US11404302B2Aug 2, 2022
Substrate susceptor using edge purging
ASM IP HOLDING BV4 citations71
US11742198B2Aug 29, 2023
Structure including SiOCN layer and method of forming same
ASM IP HOLDING BV2 citations70
US10892156B2Jan 12, 2021
Methods for forming a silicon nitride film on a substrate and related semiconductor device structures
ASM IP HOLDING BV5 citations70
US12473641B2Nov 18, 2025
Apparatus for providing a gas mixture to a reaction chamber and method of using same
ASM IP HOLDING BV1 citations64
US12406871B2Sep 2, 2025
Substrate susceptor using edge purging
ASM IP HOLDING BV1 citations63
US12406881B2Sep 2, 2025
Methods and systems for filling a gap
ASM IP HOLDING BV1 citations63
US12563983B2Feb 24, 2026
Method of forming structures including a vanadium or indium layer
ASM IP HOLDING BV0 citations62
US12540391B2Feb 3, 2026
Solid source sublimator
ASM IP HOLDING BV0 citations62
US12467137B2Nov 11, 2025
Semiconductor processing device
ASM IP HOLDING BV0 citations62
US12463094B2Nov 4, 2025
Multiple-layer method and system for forming material within a gap
ASM IP HOLDING BV0 citations62
US12351902B2Jul 8, 2025
Methods and systems for delivery of vanadium compounds
ASM IP HOLDING BV0 citations62
US12087586B2Sep 10, 2024
Method of forming chromium nitride layer and structure including the chromium nitride layer
ASM IP HOLDING BV0 citations62
US12068164B2Aug 20, 2024
Bottom-up metal nitride formation
ASM IP HOLDING BV0 citations62
US11926895B2Mar 12, 2024
Structures including metal carbide material, devices including the structures, and methods of forming same
ASM IP HOLDING BV0 citations62
US11773486B2Oct 3, 2023
Solid source sublimator
ASM IP HOLDING BV0 citations62
US11242598B2Feb 8, 2022
Structures including metal carbide material, devices including the structures, and methods of forming same
ASM IP HOLDING BV0 citations62
US12545999B2Feb 10, 2026
Method of depositing vanadium metal
ASM IP HOLDING BV0 citations61
US12416081B2Sep 16, 2025
Manifolds for uniform vapor deposition
ASM IP HOLDING BV0 citations61
US12362171B2Jul 15, 2025
Methods and systems for forming a layer comprising aluminum, titanium, and carbon
ASM IP HOLDING BV0 citations61
US12247286B2Mar 11, 2025
Heater assembly including cooling apparatus and method of using same
ASM IP HOLDING BV0 citations61
US11492701B2Nov 8, 2022
Reactor manifolds
ASM IP HOLDING BV1 citations61
US12295163B2May 6, 2025
Formation of gate stacks comprising a threshold voltage tuning layer
ASM IP HOLDING BV1 citations60
US12293911B2May 6, 2025
Structure including SiOCN layer and method of forming same
ASM IP HOLDING BV0 citations59
US11791153B2Oct 17, 2023
Deposition of hafnium oxide within a high aspect ratio hole
ASM IP HOLDING BV0 citations59
US11114294B2Sep 7, 2021
Structure including SiOC layer and method of forming same
ASM IP HOLDING BV1 citations59
US12516414B2Jan 6, 2026
Reactor manifolds
ASM IP HOLDING BV0 citations58
US12472539B2Nov 18, 2025
Methods and apparatus for cleaning a vessel
ASM IP HOLDING BV0 citations58
US12546006B2Feb 10, 2026
Precursor delivery system and method therefor
ASM IP HOLDING BV0 citations52
US11926894B2Mar 12, 2024
Reactant vaporizer and related systems and methods
ASM IP HOLDING BV0 citations52
US10529542B2Jan 7, 2020
Cross-flow reactor and method
ASM IP HOLDING BV0 citations52
Showing the top 50 of 56 patents by PatentIndex Score.