Inventor
SUN CHE-YUAN
TW7 patents
⚠️ This page may combine multiple inventors who share the name “SUN CHE-YUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
5 patentsUS10031997B1Jul 24, 2018
Forecasting wafer defects using frequency domain analysis
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11119416B2Sep 14, 2021
Method for forming semiconductor structure and overlay error estimation
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations68
US10867116B2Dec 15, 2020
Forecasting wafer defects using frequency domain analysis
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10521548B2Dec 31, 2019
Forecasting wafer defects using frequency domain analysis
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10163733B2Dec 25, 2018
Method of extracting defects
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations45