Inventor
WOODS KEENAN N
US8 patents
Patents
8 patentsUS12300503B2May 13, 2025
Etching of metal oxides using fluorine and metal halides
APPLIED MATERIALS INC0 citations61
US11239091B2Feb 1, 2022
Etching of metal oxides using fluorine and metal halides
APPLIED MATERIALS INC0 citations61
US12545998B2Feb 10, 2026
Deposition of rhenium-containing thin films
APPLIED MATERIALS INC0 citations59
US11932940B2Mar 19, 2024
Silyl pseudohalides for silicon containing films
APPLIED MATERIALS INC0 citations59
US11532474B2Dec 20, 2022
Deposition of rhenium-containing thin films
APPLIED MATERIALS INC0 citations59
US11408068B2Aug 9, 2022
Deposition of tellurium-containing thin films
APPLIED MATERIALS INC0 citations57
US11732356B2Aug 22, 2023
Multilayer encapsulation stacks by atomic layer deposition
APPLIED MATERIALS INC0 citations50
US12084464B2Sep 10, 2024
Rhenium complexes and methods of use
APPLIED MATERIALS INC0 citations48