Inventor

LASSITER THOMAS W

US2 patents

Patents

2 patents

US4846928AJul 11, 1989

Process and apparatus for detecting aberrations in production process operations

TEXAS INSTRUMENTS INC139 citations93

US9245855B2Jan 26, 2016

Methods and apparatus to reduce semiconductor wafer warpage in the presence of deep cavities

TEXAS INSTRUMENTS INC0 citations28