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Inventor
HATA YUICHI
JP
7 patents
⚠️ This page may combine multiple inventors who share the name “HATA YUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINKO ELECTRIC IND CO
2 patents
US8023246B2
Sep 20, 2011
Electrostatic chuck and method of manufacturing the same
SHINKO ELECTRIC IND CO
1 citations
51
US7483256B2
Jan 27, 2009
Electrostatic chuck
SHINKO ELECTRIC IND CO
0 citations
40
NIPPON OXYGEN CO LTD
1 patent
US5656557A
Aug 12, 1997
Process for producing various gases for semiconductor production factories
NIPPON OXYGEN CO LTD
25 citations
89
SHIRAIWA NORIO
1 patent
US8724289B2
May 13, 2014
Substrate temperature adjusting-fixing device
SHIRAIWA NORIO
5 citations
67
PANASONIC IP MAN CO LTD
1 patent
US12172824B2
Dec 24, 2024
Vacuum insulation material, and thermally insulating container and thermally insulating wall using same
PANASONIC IP MAN CO LTD
0 citations
60
PANASONIC CORP
1 patent
US10792671B2
Oct 6, 2020
Object disassembling apparatus
PANASONIC CORP
0 citations
47
AKIYAMA TOMOHIRO
1 patent
US8920536B2
Dec 30, 2014
Ore treating method, ore treating apparatus, iron manufacturing method, and iron and steel manufacturing method
AKIYAMA TOMOHIRO
0 citations
28