Inventor
ABHINAND SAI
SG3 patents
Patents
3 patentsUS11901232B2Feb 13, 2024
Automatic kerf offset mapping and correction system for laser dicing
APPLIED MATERIALS INC0 citations57
US11600492B2Mar 7, 2023
Electrostatic chuck with reduced current leakage for hybrid laser scribing and plasma etch wafer singulation process
APPLIED MATERIALS INC0 citations56
US11275300B2Mar 15, 2022
Extreme ultraviolet mask blank defect reduction
APPLIED MATERIALS INC0 citations54