Inventor

SAKAI MICHIHIRO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “SAKAI MICHIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NUFLARE TECHNOLOGY INC

1 patent

US8872139B2Oct 28, 2014

Settling time acquisition method

NUFLARE TECHNOLOGY INC8 citations79

SAKAI MICHIHIRO

1 patent

US8076649B2Dec 13, 2011

Charged particle beam writing apparatus and optical axis deviation correcting method for charged particle beam

SAKAI MICHIHIRO2 citations50