Inventor

MELIKYAN HARUTYUN

KR3 patents

Patents

3 patents

US11244847B2Feb 8, 2022

Substrate treating apparatus and substrate treating method

SEMES CO LTD0 citations47

US12278088B2Apr 15, 2025

Plasma antenna and apparatus for generating plasma having the same

SEMES CO LTD0 citations45

US10319566B2Jun 11, 2019

Apparatus for supplying power and apparatus for treating substrate including the same

SEMES CO LTD0 citations37