Inventor

EIBELHUBER MARTIN

AT2 patents

Patents

2 patents

US10656078B2May 19, 2020

Metrology device and metrology method

EV GROUP E THALLNER GMBH0 citations43

US10241398B2Mar 26, 2019

Method for application of an overgrowth layer on a germ layer

EV GROUP E THALLNER GMBH0 citations32