Inventor
DUNN TODD ROBERT
US14 patents
Patents
14 patentsUS10276355B2Apr 30, 2019
Multi-zone reactor, system including the reactor, and method of using the same
ASM IP HOLDING BV412 citations98
US10683571B2Jun 16, 2020
Gas supply manifold and method of supplying gases to chamber using same
ASM IP HOLDING BV8 citations81
US11742189B2Aug 29, 2023
Multi-zone reactor, system including the reactor, and method of using the same
ASM IP HOLDING BV2 citations72
US11404302B2Aug 2, 2022
Substrate susceptor using edge purging
ASM IP HOLDING BV4 citations71
US11781221B2Oct 10, 2023
Chemical source vessel with dip tube
ASM IP HOLDING BV2 citations70
US11626308B2Apr 11, 2023
Laser alignment fixture for a reactor system
ASM IP HOLDING BV3 citations68
US12406871B2Sep 2, 2025
Substrate susceptor using edge purging
ASM IP HOLDING BV1 citations63
US11492701B2Nov 8, 2022
Reactor manifolds
ASM IP HOLDING BV1 citations61
US12297540B2May 13, 2025
Chemical source vessel with dip tube
ASM IP HOLDING BV0 citations59
US12516414B2Jan 6, 2026
Reactor manifolds
ASM IP HOLDING BV0 citations58
US11972969B2Apr 30, 2024
Laser alignment fixture for a reactor system
ASM IP HOLDING BV0 citations58
US12033885B2Jul 9, 2024
Channeled lift pin
ASM IP HOLDING BV0 citations48
US12278129B2Apr 15, 2025
Alignment fixture for a reactor system
ASM IP HOLDING BV0 citations47
US11830731B2Nov 28, 2023
Semiconductor deposition reactor manifolds
ASM IP HOLDING BV0 citations47