Inventor
PRETI SILVIO
IT10 patents
Patents
10 patentsUS11377754B2Jul 5, 2022
Epitaxial deposition reactor with reflector external to the reaction chamber and cooling method of a susceptor and substrates
LPE SPA2 citations70
US11834753B2Dec 5, 2023
Reactor for epitaxial deposition with a heating inductor with movable turns
LPE SPA0 citations59
US12195877B2Jan 14, 2025
Substrate support device for a reaction chamber of an epitaxial reactor with gas flow rotation, reaction chamber and epitaxial reactor
LPE SPA0 citations48
US12522947B2Jan 13, 2026
Treating arrangement with transfer chamber and epitaxial reactor
LPE SPA0 citations47
US12522948B2Jan 13, 2026
Treating arrangement with loading/unloading group and epitaxial reactor
LPE SPA0 citations47
US12522949B2Jan 13, 2026
Treating arrangement with storage chamber and epitaxial reactor
LPE SPA0 citations47
US12435420B2Oct 7, 2025
Reaction chamber for an epitaxial reactor of semiconductor material with non-uniform longitudinal section and reactor
LPE SPA0 citations47
US12331423B2Jun 17, 2025
Reaction chamber for a deposition reactor with interspace and lower closing element and reactor
LPE SPA0 citations47
US12325932B2Jun 10, 2025
Method for CVD deposition of n-type doped silicon carbide and epitaxial reactor
LPE SPA0 citations39
US10815585B2Oct 27, 2020
Susceptor with substrate clamped by underpressure, and reactor for epitaxial deposition
LPE SPA0 citations38