Inventor
COREA FRANCESCO
IT9 patents
Patents
9 patentsUS10211085B2Feb 19, 2019
Tool for manipulating substrates, manipulation method and epitaxial reactor
LPE SPA2 citations70
US12522948B2Jan 13, 2026
Treating arrangement with loading/unloading group and epitaxial reactor
LPE SPA0 citations47
US12522947B2Jan 13, 2026
Treating arrangement with transfer chamber and epitaxial reactor
LPE SPA0 citations47
US12522949B2Jan 13, 2026
Treating arrangement with storage chamber and epitaxial reactor
LPE SPA0 citations47
US12435420B2Oct 7, 2025
Reaction chamber for an epitaxial reactor of semiconductor material with non-uniform longitudinal section and reactor
LPE SPA0 citations47
US12371779B2Jul 29, 2025
Reaction chamber comprising a rotating element for the deposition of a semiconductor material
LPE SPA0 citations47
US12331423B2Jun 17, 2025
Reaction chamber for a deposition reactor with interspace and lower closing element and reactor
LPE SPA0 citations47
US10697087B2Jun 30, 2020
Susceptor with supporting element
LPE SPA0 citations32
US10392723B2Aug 27, 2019
Reaction chamber for epitaxial growth with a loading/unloading device and reactor
LPE SPA0 citations32