Inventor
Chen you-feng
TW6 patents
Patents
6 patentsUS10074547B2Sep 11, 2018
Photoresist nozzle device and photoresist supply system
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US11742227B2Aug 29, 2023
Wafer cleaning system and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US10515833B2Dec 24, 2019
Wafer cleaning system and method
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations70
US9919350B2Mar 20, 2018
Cup-wash device, semiconductor apparatus, and cup cleaning method
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations68
US12087602B2Sep 10, 2024
Wafer cleaning method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US9892982B2Feb 13, 2018
Method for controlling exhaust flow in wafer processing module
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations39