Inventor

IGETA TAKAHIRO

JP2 patents

⚠️ This page may combine multiple inventors who share the name “IGETA TAKAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NEC CORP

1 patent

US8009285B2Aug 30, 2011

Photomask mounting/housing device and resist inspection method and resist inspection apparatus using same

NEC CORP1 citations45

KATOU YOSHIKAZU

1 patent

US8179523B2May 15, 2012

Photomask mounting/housing device and resist inspection method and resist inspection apparatus using same

KATOU YOSHIKAZU0 citations39