P

Inventor

NAKAGAWA KENJI

69 patents
⚠️ This page may combine multiple inventors who share the name “NAKAGAWA KENJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FUJITSU LTD

25 patents
US5364716ANov 15, 1994

Pattern exposing method using phase shift and mask used therefor

FUJITSU LTD116 citations97
US5465220ANov 7, 1995

Optical exposure method

FUJITSU LTD55 citations96
US5489509AFeb 6, 1996

Mask, mask producing method and pattern forming method using mask

FUJITSU LTD40 citations95
US6555922B1Apr 29, 2003

IC bonding pad combined with mark or monitor

FUJITSU LTD21 citations93
US4881257ANov 14, 1989

Deformation free X-ray exposure mask for X-ray lithography

FUJITSU LTD25 citations93
US6045976AApr 4, 2000

Optical exposure method

FUJITSU LTD29 citations92
US5607821AMar 4, 1997

Optical exposure method

FUJITSU LTD18 citations92
US5472813ADec 5, 1995

Pattern exposing method using phase shift and mask used therefor

FUJITSU LTD24 citations92
US5415952AMay 16, 1995

Fine pattern lithography with positive use of interference

FUJITSU LTD22 citations92
US6093511AJul 25, 2000

Method of manufacturing semiconductor device

FUJITSU LTD20 citations84
US6420094B1Jul 16, 2002

Optical exposure method

FUJITSU LTD13 citations82
US5637424AJun 10, 1997

Fine pattern lithography with positive use of interference

FUJITSU LTD16 citations82
US5786115AJul 28, 1998

Mask producing method

FUJITSU LTD13 citations81
US5082695AJan 21, 1992

Method of fabricating an x-ray exposure mask

FUJITSU LTD19 citations81
US6127098AOct 3, 2000

Method of making resist patterns

FUJITSU LTD12 citations74
US5514498AMay 7, 1996

Reticle with phase-shifters and a method of fabricating the same

FUJITSU LTD10 citations74
US5338647AAug 16, 1994

Reflection type photomask and reflection type photolithography method comprising a concavo-convex surface

FUJITSU LTD13 citations74
US5276551AJan 4, 1994

Reticle with phase-shifters and a method of fabricating the same

FUJITSU LTD13 citations74
US5190836AMar 2, 1993

Reflection type photomask with phase shifter

FUJITSU LTD13 citations74
US5004927AApr 2, 1991

Process for forming a fine pattern having a high aspect ratio

FUJITSU LTD10 citations74
US4939052AJul 3, 1990

X-ray exposure mask

FUJITSU LTD13 citations74
US4678919AJul 7, 1987

Electron beam exposure method and apparatus

FUJITSU LTD9 citations74
US5674646AOct 7, 1997

Mask producing method

FUJITSU LTD9 citations73
US5624791AApr 29, 1997

Pattern forming method using mask

FUJITSU LTD7 citations73
US5863709AJan 26, 1999

Deep UV photolithography with reduced halation

FUJITSU LTD2 citations63

MISUMI CORP

5 patents

HOYA CORP

3 patents

HOYA GLASS WORKS LTD

3 patents

AUTONETWORKS TECHNOLOGIES LTD

3 patents

SANYO ELECTRIC CO

2 patents

TOYOTA MOTOR CO LTD

2 patents

FUKUDA METAL FOIL POWDER

1 patent

DDK LTD

1 patent

OTIS ELEVATOR CO

1 patent

KAWASAKI STEEL CO

1 patent

HITACHI SHIPBUILDING ENG CO

1 patent

SAKAGUCHI KIYOFUMI

1 patent

VISION PSYTEC CO LTD

1 patent

Showing the top 50 of 69 patents by PatentIndex Score.