Inventor

LINDQUIST PAUL

US4 patents

⚠️ This page may combine multiple inventors who share the name “LINDQUIST PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NUTOOL INC

2 patents

US6413403B1Jul 2, 2002

Method and apparatus employing pad designs and structures with improved fluid distribution

NUTOOL INC93 citations97

US6802946B2Oct 12, 2004

Apparatus for controlling thickness uniformity of electroplated and electroetched layers

NUTOOL INC26 citations91

ASM NUTOOL INC

1 patent

US6821409B2Nov 23, 2004

Electroetching methods and systems using chemical and mechanical influence

ASM NUTOOL INC10 citations73

NOVELLUS SYSTEMS INC

1 patent

US7435323B2Oct 14, 2008

Method for controlling thickness uniformity of electroplated layers

NOVELLUS SYSTEMS INC7 citations72