Inventor

GU WENFEI

US2 patents

⚠️ This page may combine multiple inventors who share the name “GU WENFEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

1 patent

US10140698B2Nov 27, 2018

Polygon-based geometry classification for semiconductor mask inspection

KLA TENCOR CORP1 citations47

KLA CORP

1 patent

US11727556B2Aug 15, 2023

Defect detection for multi-die masks

KLA CORP0 citations37