Inventor
MURARKA SHYAM P
17 patents
⚠️ This page may combine multiple inventors who share the name “MURARKA SHYAM P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BELL TELEPHONE LABOR INC
7 patentsUS4378628AApr 5, 1983
Cobalt silicide metallization for semiconductor integrated circuits
BELL TELEPHONE LABOR INC105 citations96
US4276557AJun 30, 1981
Integrated semiconductor circuit structure and method for making it
BELL TELEPHONE LABOR INC59 citations96
US4324038AApr 13, 1982
Method of fabricating MOS field effect transistors
BELL TELEPHONE LABOR INC128 citations95
US4337476AJun 29, 1982
Silicon rich refractory silicides as gate metal
BELL TELEPHONE LABOR INC48 citations92
US4332839AJun 1, 1982
Method for making integrated semiconductor circuit structure with formation of Ti or Ta silicide
BELL TELEPHONE LABOR INC30 citations92
US4149905AApr 17, 1979
Method of limiting stacking faults in oxidized silicon wafers
BELL TELEPHONE LABOR INC35 citations91
US4134125AJan 9, 1979
Passivation of metallized semiconductor substrates
BELL TELEPHONE LABOR INC36 citations90
RENSSELAER POLYTECH INST
4 patentsUS5637185AJun 10, 1997
Systems for performing chemical mechanical planarization and process for conducting same
RENSSELAER POLYTECH INST118 citations95
US7019386B2Mar 28, 2006
Siloxane epoxy polymers for low-k dielectric applications
RENSSELAER POLYTECH INST11 citations81
US7202159B2Apr 10, 2007
Diffusion barriers comprising a self-assembled monolayer
RENSSELAER POLYTECH INST5 citations62
US7285842B2Oct 23, 2007
Siloxane epoxy polymers as metal diffusion barriers to reduce electromigration
RENSSELAER POLYTECH INST2 citations60
SEMITOOL INC
3 patentsUS6319387B1Nov 20, 2001
Copper alloy electroplating bath for microelectronic applications
SEMITOOL INC300 citations98
US6368966B1Apr 9, 2002
Metallization structures for microelectronic applications and process for forming the structures
SEMITOOL INC71 citations95
US6486533B2Nov 26, 2002
Metallization structures for microelectronic applications and process for forming the structures
SEMITOOL INC23 citations92