Inventor
ARAKI KAORU
JP6 patents
⚠️ This page may combine multiple inventors who share the name “ARAKI KAORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO CHEMICAL CO
5 patentsUS6818379B2Nov 16, 2004
Sulfonium salt and use thereof
SUMITOMO CHEMICAL CO14 citations82
US6846609B2Jan 25, 2005
Chemical amplification type positive resist composition
SUMITOMO CHEMICAL CO13 citations80
US7803513B2Sep 28, 2010
Chemically amplified resist composition
SUMITOMO CHEMICAL CO2 citations61
US10126650B2Nov 13, 2018
Resist composition
SUMITOMO CHEMICAL CO0 citations51
US9229321B2Jan 5, 2016
Salt and photoresist composition comprising the same
SUMITOMO CHEMICAL CO1 citations51