Inventor

YONEKURA SATOSHI

JP3 patents

Patents

3 patents

US9831067B2Nov 28, 2017

Film-forming apparatus

TOKYO ELECTRON LTD2 citations70

US10513777B2Dec 24, 2019

Film formation device

TOKYO ELECTRON LTD2 citations69

US11281116B2Mar 22, 2022

Substrate stage and substrate processing apparatus

TOKYO ELECTRON LTD0 citations58