Inventor

Aguilar Amaya Silvia Rocio

US2 patents

Patents

2 patents

US10566216B2Feb 18, 2020

Equipment front end module gas recirculation

LAM RES CORP6 citations59

US10190865B2Jan 29, 2019

Verifying end effector flatness using electrical continuity

LAM RES CORP0 citations47