Inventor

NORWOOD DAVID A

US7 patents

Patents

7 patents

US5001764AMar 19, 1991

Guardbands for pattern inspector

TEXAS INSTRUMENTS INC87 citations95

US5018212AMay 21, 1991

Defect area consolidation for pattern inspector

TEXAS INSTRUMENTS INC29 citations92

US4985927AJan 15, 1991

Method of detecting and reviewing pattern defects

TEXAS INSTRUMENTS INC102 citations92

US4979223ADec 18, 1990

Data handling system for pattern inspector or writer

TEXAS INSTRUMENTS INC43 citations92

US4969200ANov 6, 1990

Target autoalignment for pattern inspector or writer

TEXAS INSTRUMENTS INC20 citations79

US4989255AJan 29, 1991

Expansion of compact database for pattern inspector or writer

TEXAS INSTRUMENTS INC21 citations78

US4984282AJan 8, 1991

Parallel processing of reference and guardband data

TEXAS INSTRUMENTS INC12 citations72