Inventor
RAY WAYNE J
US9 patents
Patents
9 patentsUS5219793AJun 15, 1993
Method for forming pitch independent contacts and a semiconductor device having the same
MOTOROLA INC149 citations98
US4997790AMar 5, 1991
Process for forming a self-aligned contact structure
MOTOROLA INC120 citations97
US5538922AJul 23, 1996
Method for forming contact to a semiconductor device
MOTOROLA INC74 citations96
US5272117ADec 21, 1993
Method for planarizing a layer of material
MOTOROLA INC94 citations96
US5210435AMay 11, 1993
ITLDD transistor having a variable work function
MOTOROLA INC69 citations96
US5061647AOct 29, 1991
ITLDD transistor having variable work function and method for fabricating the same
MOTOROLA INC61 citations96
US5158910AOct 27, 1992
Process for forming a contact structure
MOTOROLA INC73 citations95
US5246537ASep 21, 1993
Method of forming recessed oxide isolation
MOTOROLA INC25 citations92
USRE35294EJul 9, 1996
Polysilicon encapsulated localized oxidation of silicon
MOTOROLA INC4 citations62