Inventor
THOMAS MICHAEL E
US58 patents
⚠️ This page may combine multiple inventors who share the name “THOMAS MICHAEL E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NAT SEMICONDUCTOR CORP
31 patentsUS6509283B1Jan 21, 2003
Thermal oxidation method utilizing atomic oxygen to reduce dangling bonds in silicon dioxide grown on silicon
NAT SEMICONDUCTOR CORP191 citations99
US5197999AMar 30, 1993
Polishing pad for planarization
NAT SEMICONDUCTOR CORP156 citations99
US5688724ANov 18, 1997
Method of providing a dielectric structure for semiconductor devices
NAT SEMICONDUCTOR CORP159 citations98
US6348421B1Feb 19, 2002
Dielectric gap fill process that effectively reduces capacitance between narrow metal lines using HDP-CVD
NAT SEMICONDUCTOR CORP54 citations96
US5904507AMay 18, 1999
Programmable anti-fuses using laser writing
NAT SEMICONDUCTOR CORP60 citations96
US5572042ANov 5, 1996
Integrated circuit vertical electronic grid device and method
NAT SEMICONDUCTOR CORP44 citations95
US5150019ASep 22, 1992
Integrated circuit electronic grid device and method
NAT SEMICONDUCTOR CORP71 citations95
US5111355AMay 5, 1992
High value tantalum oxide capacitor
NAT SEMICONDUCTOR CORP100 citations95
US5051690ASep 24, 1991
Apparatus and method for detecting vertically propagated defects in integrated circuits
NAT SEMICONDUCTOR CORP53 citations95
US5679405AOct 21, 1997
Method for preventing substrate backside deposition during a chemical vapor deposition operation
NAT SEMICONDUCTOR CORP54 citations94
US5133284AJul 28, 1992
Gas-based backside protection during substrate processing
NAT SEMICONDUCTOR CORP111 citations94
US6017585AJan 25, 2000
High efficiency semiconductor wafer coating apparatus and method
NAT SEMICONDUCTOR CORP26 citations93
US5414301AMay 9, 1995
High temperature interconnect system for an integrated circuit
NAT SEMICONDUCTOR CORP39 citations93
US5317141AMay 31, 1994
Apparatus and method for high-accuracy alignment
NAT SEMICONDUCTOR CORP35 citations93
US5266153ANov 30, 1993
Gas distribution head for plasma deposition and etch systems
NAT SEMICONDUCTOR CORP40 citations93
US5249732AOct 5, 1993
Method of bonding semiconductor chips to a substrate
NAT SEMICONDUCTOR CORP37 citations93
US5198008AMar 30, 1993
Method of fabricating an optical interconnect structure
NAT SEMICONDUCTOR CORP34 citations93
US5123078AJun 16, 1992
Optical interconnects
NAT SEMICONDUCTOR CORP22 citations93
US6277726B1Aug 21, 2001
Method for decreasing contact resistance of an electrode positioned inside a misaligned via for multilevel interconnects
NAT SEMICONDUCTOR CORP21 citations92
US6004878ADec 21, 1999
Method for silicide stringer removal in the fabrication of semiconductor integrated circuits
NAT SEMICONDUCTOR CORP45 citations92
US5195729AMar 23, 1993
Wafer carrier
NAT SEMICONDUCTOR CORP58 citations89
US5453154ASep 26, 1995
Method of making an integrated circuit microwave interconnect and components
NAT SEMICONDUCTOR CORP40 citations88
US6074929AJun 13, 2000
Box isolation technique for integrated circuit structures
NAT SEMICONDUCTOR CORP18 citations84
US6242354B1Jun 5, 2001
Semiconductor device with self aligned contacts having integrated silicide stringer removal and method thereof
NAT SEMICONDUCTOR CORP19 citations83
US6383933B1May 7, 2002
Method of using organic material to enhance STI planarization or other planarization processes
NAT SEMICONDUCTOR CORP14 citations79
US6099639AAug 8, 2000
Method for solid-state formation of diamond
NAT SEMICONDUCTOR CORP11 citations74
US5783363AJul 21, 1998
Method of performing charged-particle lithography
NAT SEMICONDUCTOR CORP7 citations74
US5235663AAug 10, 1993
Optical interconnects
NAT SEMICONDUCTOR CORP13 citations74
US5091048AFeb 25, 1992
Ion milling to obtain planarization
NAT SEMICONDUCTOR CORP14 citations74
US6593615B1Jul 15, 2003
Dielectric gap fill process that effectively reduces capacitance between narrow metal lines using HDP-CVD
NAT SEMICONDUCTOR CORP7 citations73
US6103629AAug 15, 2000
Self-aligned interconnect using high selectivity metal pillars and a via exclusion mask
NAT SEMICONDUCTOR CORP6 citations73
FAIRCHILD CAMERA INSTR CO
5 patentsUS5117276AMay 26, 1992
High performance interconnect system for an integrated circuit
FAIRCHILD CAMERA INSTR CO167 citations99
US4920071AApr 24, 1990
High temperature interconnect system for an integrated circuit
FAIRCHILD CAMERA INSTR CO197 citations99
US4829363AMay 9, 1989
Structure for inhibiting dopant out-diffusion
FAIRCHILD CAMERA INSTR CO37 citations93
US4640004AFeb 3, 1987
Method and structure for inhibiting dopant out-diffusion
FAIRCHILD CAMERA INSTR CO44 citations93
US4489482ADec 25, 1984
Impregnation of aluminum interconnects with copper
FAIRCHILD CAMERA INSTR CO8 citations74
FRAMDRIVE
5 patentsUS5592643AJan 7, 1997
Ferroelectric storage device emulating a rotating disk drive unit in acomputer system and having a parallel data interface
FRAMDRIVE46 citations92
US5592644AJan 7, 1997
Ferroelectric storage device emulating a rotating disk drive unit in a computer system and having an optical data interface
FRAMDRIVE40 citations92
US5592642AJan 7, 1997
Ferroelectric storage device emulating a rotating disk drive unit in a computer system and having an optical and parallel data interface
FRAMDRIVE38 citations92
US5604881AFeb 18, 1997
Ferroelectric storage device emulating a rotating disk drive unit in a computer system and having a multiplexed optical data interface
FRAMDRIVE12 citations74
US5592646AJan 7, 1997
Ferroelectric storage device emulating a rotating disk drive unit in a computer system and having a parallel and multiplexed optical data interface
FRAMDRIVE7 citations74
FAIRCHILD SEMICONDUCTOR
4 patentsUS4933743AJun 12, 1990
High performance interconnect system for an integrated circuit
FAIRCHILD SEMICONDUCTOR242 citations99
US5000818AMar 19, 1991
Method of fabricating a high performance interconnect system for an integrated circuit
FAIRCHILD SEMICONDUCTOR104 citations96
US4670091AJun 2, 1987
Process for forming vias on integrated circuits
FAIRCHILD SEMICONDUCTOR95 citations96
US4835466AMay 30, 1989
Apparatus and method for detecting spot defects in integrated circuits
FAIRCHILD SEMICONDUCTOR63 citations95
(unassigned)
3 patentsSAADAT IRFAN
1 patentGEN FOODS CORP
1 patentShowing the top 50 of 58 patents by PatentIndex Score.