Inventor
ISHIHARA AKIRA
JP24 patents
⚠️ This page may combine multiple inventors who share the name “ISHIHARA AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS6874515B2Apr 5, 2005
Substrate dual-side processing apparatus
TOKYO ELECTRON LTD78 citations94
US6842932B2Jan 18, 2005
Cleaning processing system and cleaning processing apparatus
TOKYO ELECTRON LTD18 citations92
US6292972B1Sep 25, 2001
Scrub washing apparatus and scrub washing method
TOKYO ELECTRON LTD17 citations92
US8043469B2Oct 25, 2011
Substrate processing method, substrate processing apparatus, and storage medium
TOKYO ELECTRON LTD19 citations84
US6178580B1Jan 30, 2001
Processing apparatus
TOKYO ELECTRON LTD17 citations82
US6652662B1Nov 25, 2003
Substrate surface processing apparatus and method
TOKYO ELECTRON LTD10 citations73
US6491760B2Dec 10, 2002
Scrub washing method
TOKYO ELECTRON LTD6 citations73
US7451515B2Nov 18, 2008
Cleaning processing system and cleaning processing apparatus
TOKYO ELECTRON LTD3 citations57
CENTRAL GLASS CO LTD
5 patentsUS7964759B2Jun 21, 2011
Method for producing 3,3,3-trifluoropropyne
CENTRAL GLASS CO LTD10 citations84
US5902859AMay 11, 1999
Elastic fluorohydrocarbon resin and method of producing same
CENTRAL GLASS CO LTD7 citations72
US5696215ADec 9, 1997
Elastic fluorohydrocarbon resin and method of producing same
CENTRAL GLASS CO LTD6 citations72
US4609715ASep 2, 1986
Copolymer of fluoromethacrylate with styrene or its derivative and method of preparing same
CENTRAL GLASS CO LTD9 citations71
US5124494AJun 23, 1992
Continuous process for preparing chlorotrifluoroethylene
CENTRAL GLASS CO LTD8 citations67
KOMATSU MFG CO LTD
3 patentsUS5879237AMar 9, 1999
Device for damping rotational fluctuation and torsional vibration of rotary shaft
KOMATSU MFG CO LTD19 citations84
US5640935AJun 24, 1997
Torque variation restraining device of an engine accessory driving system
KOMATSU MFG CO LTD8 citations73
US4329947AMay 18, 1982
Cylinder block structure of an internal combustion engine
KOMATSU MFG CO LTD5 citations62