Inventor
TRIPATHI PRABHAKAR P
US7 patents
Patents
7 patentsUS6109775AAug 29, 2000
Method for adjusting the density of lines and contact openings across a substrate region for improving the chemical-mechanical polishing of a thin-film later disposed thereon
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US5776831AJul 7, 1998
Method of forming a high electromigration resistant metallization system
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US5379233AJan 3, 1995
Method and structure for improving patterning design for processing
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US6569751B1May 27, 2003
Low via resistance system
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US5654897AAug 5, 1997
Method and structure for improving patterning design for processing
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US5477466ADec 19, 1995
Method and structure for improving patterning design for processing
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US6893962B2May 17, 2005
Low via resistance system
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