Inventor
CHISHOLM MICHAEL FRANCIS
US4 patents
Patents
4 patentsUS5686356ANov 11, 1997
Conductor reticulation for improved device planarity
TEXAS INSTRUMENTS INC50 citations94
US6495907B1Dec 17, 2002
Conductor reticulation for improved device planarity
TEXAS INSTRUMENTS INC16 citations91
US5906754AMay 25, 1999
Apparatus integrating pad conditioner with a wafer carrier for chemical-mechanical polishing applications
TEXAS INSTRUMENTS INC41 citations85
US5755979AMay 26, 1998
Application of semiconductor IC fabrication techniques to the manufacturing of a conditioning head for pad conditioning during chemical-mechanical polish
TEXAS INSTRUMENTS INC8 citations71