Inventor
GOTO NAOHISA
JP19 patents
⚠️ This page may combine multiple inventors who share the name “GOTO NAOHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS6528752B1Mar 4, 2003
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD388 citations99
US5698036ADec 16, 1997
Plasma processing apparatus
TOKYO ELECTRON LTD502 citations99
US6347602B2Feb 19, 2002
Plasma processing apparatus
TOKYO ELECTRON LTD68 citations96
US6311638B1Nov 6, 2001
Plasma processing method and apparatus
TOKYO ELECTRON LTD73 citations96
US6646224B2Nov 11, 2003
Plasma-assisted processing system and plasma-assisted processing method
TOKYO ELECTRON LTD21 citations92
US6322662B1Nov 27, 2001
Plasma treatment system
TOKYO ELECTRON LTD19 citations84
US7582569B2Sep 1, 2009
Distributor and distributing method, plasma processing system and method, and process for fabricating LCD
TOKYO ELECTRON LTD6 citations60
GOTO NAOHISA
3 patentsUS5402136AMar 28, 1995
Combined capacitive loaded monopole and notch array with slits for multiple resonance and impedance matching pins
GOTO NAOHISA71 citations92
US4819003AApr 4, 1989
Flat circular unidirectional microwave antenna
GOTO NAOHISA33 citations89
US7325511B2Feb 5, 2008
Microwave plasma processing apparatus, microwave processing method and microwave feeding apparatus
GOTO NAOHISA12 citations83