Inventor
MOORING ANNE
US2 patents
Patents
2 patentsUS5039596AAug 13, 1991
Deep u.v. photoresist process utilizing compositions containing polycyclic cyclopentane 2-diazo-1,3-dione
HOECHST CELANESE CORP9 citations70
US5182185AJan 26, 1993
Deep u.v. photoresist compositions containing 4-tert-butylstyrene/maleimide copolymer and polycyclic cyclopentane-2-diazo-1,3-dione and elements utilizing the compositions
HOECHST CELANESE CORP2 citations59