Inventor
REISS TERRY
US4 patents
Patents
4 patentsUS6952656B1Oct 4, 2005
Wafer fabrication data acquisition and management systems
APPLIED MATERIALS INC475 citations93
US6625513B1Sep 23, 2003
Run-to-run control over semiconductor processing tool based upon mirror image target
APPLIED MATERIALS INC29 citations91
US6895293B2May 17, 2005
Fault detection and virtual sensor methods for tool fault monitoring
APPLIED MATERIALS INC19 citations89
US6466895B1Oct 15, 2002
Defect reference system automatic pattern classification
APPLIED MATERIALS INC67 citations89