Inventor
DEL PUPPO HELENE
US4 patents
Patents
4 patentsUS9633846B2Apr 25, 2017
Internal plasma grid applications for semiconductor fabrication
LAM RES CORP8 citations81
US9230819B2Jan 5, 2016
Internal plasma grid applications for semiconductor fabrication in context of ion-ion plasma processing
LAM RES CORP15 citations81
US7682980B2Mar 23, 2010
Method to improve profile control and N/P loading in dual doped gate applications
LAM RES CORP3 citations61
US9385003B1Jul 5, 2016
Residue free systems and methods for isotropically etching silicon in tight spaces
LAM RES CORP0 citations48