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Inventor
SPECK ROBERT K
US
2 patents
⚠️ This page may combine multiple inventors who share the name “SPECK ROBERT K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DELPHI TECH INC
1 patent
US6828172B2
Dec 7, 2004
Process for a monolithically-integrated micromachined sensor and circuit
DELPHI TECH INC
24 citations
90
SPECK ROBERT K
1 patent
US8536014B2
Sep 17, 2013
Self aligned silicide device fabrication
SPECK ROBERT K
0 citations
29