Inventor
FANG SYCHYI
US7 patents
⚠️ This page may combine multiple inventors who share the name “FANG SYCHYI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEL CORP
5 patentsUS5886410AMar 23, 1999
Interconnect structure with hard mask and low dielectric constant materials
INTEL CORP110 citations96
US6309956B1Oct 30, 2001
Fabricating low K dielectric interconnect systems by using dummy structures to enhance process
INTEL CORP138 citations95
US6027995AFeb 22, 2000
Method for fabricating an interconnect structure with hard mask and low dielectric constant materials
INTEL CORP59 citations94
US5935868AAug 10, 1999
Interconnect structure and method to achieve unlanded vias for low dielectric constant materials
INTEL CORP69 citations94
US5880030AMar 9, 1999
Unlanded via structure and method for making same
INTEL CORP30 citations92