Inventor
DONDE ARIK
US12 patents
⚠️ This page may combine multiple inventors who share the name “DONDE ARIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS6108189AAug 22, 2000
Electrostatic chuck having improved gas conduits
APPLIED MATERIALS INC255 citations99
US6721162B2Apr 13, 2004
Electrostatic chuck having composite dielectric layer and method of manufacture
APPLIED MATERIALS INC76 citations98
US5720818AFeb 24, 1998
Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck
APPLIED MATERIALS INC150 citations98
US6414834B1Jul 2, 2002
Dielectric covered electrostatic chuck
APPLIED MATERIALS INC56 citations96
US5904776AMay 18, 1999
Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck
APPLIED MATERIALS INC52 citations96
US5986875ANov 16, 1999
Puncture resistant electrostatic chuck
APPLIED MATERIALS INC42 citations95
US5910338AJun 8, 1999
Surface preparation to enhance adhesion of a dielectric layer
APPLIED MATERIALS INC69 citations95
US5729423AMar 17, 1998
Puncture resistant electrostatic chuck
APPLIED MATERIALS INC57 citations95
US6405423B1Jun 18, 2002
Method for producing vacuum processing chambers
APPLIED MATERIALS INC29 citations92
US6182851B1Feb 6, 2001
Vacuum processing chambers and method for producing
APPLIED MATERIALS INC18 citations92
US5788453AAug 4, 1998
Piezoelectric wafer gripping system for robot blades
APPLIED MATERIALS INC49 citations92