Inventor
WELDON EDWIN C
US10 patents
Patents
10 patentsUS6108189AAug 22, 2000
Electrostatic chuck having improved gas conduits
APPLIED MATERIALS INC255 citations99
US6721162B2Apr 13, 2004
Electrostatic chuck having composite dielectric layer and method of manufacture
APPLIED MATERIALS INC76 citations98
US5720818AFeb 24, 1998
Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck
APPLIED MATERIALS INC150 citations98
US6263829B1Jul 24, 2001
Process chamber having improved gas distributor and method of manufacture
APPLIED MATERIALS INC127 citations97
US6440221B2Aug 27, 2002
Process chamber having improved temperature control
APPLIED MATERIALS INC93 citations96
US6414834B1Jul 2, 2002
Dielectric covered electrostatic chuck
APPLIED MATERIALS INC56 citations96
US5904776AMay 18, 1999
Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck
APPLIED MATERIALS INC52 citations96
US5986875ANov 16, 1999
Puncture resistant electrostatic chuck
APPLIED MATERIALS INC42 citations95
US5729423AMar 17, 1998
Puncture resistant electrostatic chuck
APPLIED MATERIALS INC57 citations95
US6220607B1Apr 24, 2001
Thermally conductive conformal media
APPLIED MATERIALS INC30 citations92