Inventor
DYER TIMOTHY
US9 patents
⚠️ This page may combine multiple inventors who share the name “DYER TIMOTHY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS6465051B1Oct 15, 2002
Method of operating high density plasma CVD reactor with combined inductive and capacitive coupling
APPLIED MATERIALS INC221 citations99
US6108189AAug 22, 2000
Electrostatic chuck having improved gas conduits
APPLIED MATERIALS INC255 citations99
US6721162B2Apr 13, 2004
Electrostatic chuck having composite dielectric layer and method of manufacture
APPLIED MATERIALS INC76 citations98
US5720818AFeb 24, 1998
Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck
APPLIED MATERIALS INC150 citations98
US6414834B1Jul 2, 2002
Dielectric covered electrostatic chuck
APPLIED MATERIALS INC56 citations96
US5904776AMay 18, 1999
Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck
APPLIED MATERIALS INC52 citations96