Inventor
IMAFUKU KOSUKE
JP13 patents
⚠️ This page may combine multiple inventors who share the name “IMAFUKU KOSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS6544380B2Apr 8, 2003
Plasma treatment method and apparatus
TOKYO ELECTRON LTD104 citations98
US6074518AJun 13, 2000
Plasma processing apparatus
TOKYO ELECTRON LTD276 citations98
USD411516SJun 29, 1999
Gas diffusion plate for electrode of semiconductor wafer processing apparatus
TOKYO ELECTRON LTD469 citations98
US5698062ADec 16, 1997
Plasma treatment apparatus and method
TOKYO ELECTRON LTD161 citations98
US5716534AFeb 10, 1998
Plasma processing method and plasma etching method
TOKYO ELECTRON LTD145 citations97
US6106737AAug 22, 2000
Plasma treatment method utilizing an amplitude-modulated high frequency power
TOKYO ELECTRON LTD66 citations96
US6723202B2Apr 20, 2004
Worktable device and plasma processing apparatus for semiconductor process
TOKYO ELECTRON LTD124 citations94
US6391147B2May 21, 2002
Plasma treatment method and apparatus
TOKYO ELECTRON LTD49 citations92
US9399584B2Jul 26, 2016
Silicon focus ring
TOKYO ELECTRON LTD0 citations51
US9290391B2Mar 22, 2016
Silicon component for plasma etching apparatus
TOKYO ELECTRON LTD0 citations51