Inventor
YOSHIOKA KAZUTOSHI
JP14 patents
Patents
14 patentsUS5968691AOct 19, 1999
Method and apparatus for coating resist and developing the coated resist
TOKYO ELECTRON LTD93 citations98
US5460478AOct 24, 1995
Method for processing wafer-shaped substrates
TOKYO ELECTRON LTD123 citations98
US6051349AApr 18, 2000
Apparatus for coating resist and developing the coated resist
TOKYO ELECTRON LTD60 citations96
US6002108ADec 14, 1999
Baking apparatus and baking method
TOKYO ELECTRON LTD69 citations96
US5938847AAug 17, 1999
Method and apparatus for coating a film on an object being processed
TOKYO ELECTRON LTD58 citations96
US5364222ANov 15, 1994
Apparatus for processing wafer-shaped substrates
TOKYO ELECTRON LTD107 citations96
US5297910AMar 29, 1994
Transportation-transfer device for an object of treatment
TOKYO ELECTRON LTD70 citations96
US4812201AMar 14, 1989
Method of ashing layers, and apparatus for ashing layers
TOKYO ELECTRON LTD481 citations96
US6551400B2Apr 22, 2003
Coating apparatus
TOKYO ELECTRON LTD21 citations92
US6503003B2Jan 7, 2003
Film forming method and film forming apparatus
TOKYO ELECTRON LTD19 citations92
US6268013B1Jul 31, 2001
Coating a resist film, with pretesting for particle contamination
TOKYO ELECTRON LTD24 citations92
US6261744B1Jul 17, 2001
Baking apparatus and baking method
TOKYO ELECTRON LTD33 citations92
US6228561B1May 8, 2001
Film forming method and film forming apparatus
TOKYO ELECTRON LTD36 citations92
US6168667B1Jan 2, 2001
Resist-processing apparatus
TOKYO ELECTRON LTD32 citations92