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Inventor
ROZARIO LISA V
US
2 patents
Patents
2 patents
US7298159B1
Nov 20, 2007
Method of measuring the leakage current of a deep trench isolation structure
NAT SEMICONDUCTOR CORP
15 citations
80
US7960998B2
Jun 14, 2011
Electrical test structure and method for characterization of deep trench sidewall reliability
NAT SEMICONDUCTOR CORP
5 citations
59