Inventor

KODASHIMA YASUSHI

JP2 patents

Patents

2 patents

US6852194B2Feb 8, 2005

Processing apparatus, transferring apparatus and transferring method

TOKYO ELECTRON LTD114 citations93

US11605712B2Mar 14, 2023

Fabrication process flow of dielectric layer for isolation of nano-sheet devices on bulk silicon substrate

TOKYO ELECTRON LTD0 citations60