Inventor
BOGER MICHAEL S
US3 patents
Patents
3 patentsUS7140847B2Nov 28, 2006
Integrated high vacuum pumping system
BOC GROUP INC15 citations81
US7278831B2Oct 9, 2007
Apparatus and method for control, pumping and abatement for vacuum process chambers
BOC GROUP INC13 citations79
US7021903B2Apr 4, 2006
Fore-line preconditioning for vacuum pumps
BOC GROUP INC15 citations79