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Inventor
NAMKOONG WHAN
KR
2 patents
Patents
2 patents
US9087729B2
Jul 21, 2015
Semiconductor devices including unitary supports
SAMSUNG ELECTRONICS CO LTD
12 citations
81
US7466428B2
Dec 16, 2008
Method of measuring thickness of thin layer in semiconductor device and apparatus for performing method
SAMSUNG ELECTRONICS CO LTD
2 citations
53