Inventor

CHI MENG KU

TW2 patents

Patents

2 patents

US11816411B2Nov 14, 2023

Method and system for semiconductor wafer defect review

TAIWAN SEMICONDUCTOR MFG CO LTD5 citations82

US12190036B2Jan 7, 2025

Method and system for semiconductor wafer defect review

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59